Lam Research and CEA-Leti expand specialty-technology research collaboration

Lam and CEA-Leti signed a new multi-year agreement to develop devices built on specialty technologies such as MEMS, RF, photonics and compound semiconductors. Lam supplies etch and deposition technology, including its Prestis pulsed laser deposition system, while CEA-Leti contributes materials analysis, surface science and device characterization. The release discloses no financial terms and does not state a duration.

• New multi-year agreement with no financial terms disclosed
• Technologies named: MEMS, 3D imaging and sensors, power management, RF, photonics and optical interconnect
• Research areas include RF filters, electro-optic modulation and quantum optics
• Lam contributes etch and deposition, including the Prestis pulsed laser deposition system