Deposition systems (ALTUS, SABRE)
Deposition tools, including the ALTUS Halo molybdenum ALD tool, are in production and in customer qualification.
What it is
Tools that deposit metal and dielectric films on wafers, including the ALTUS family for tungsten and molybdenum metallization and the SABRE family for copper and other fills. Lam says ALTUS Halo is the first molybdenum ALD tool in production. Lam does not report deposition revenue on its own, so there are no product-level KPIs here.
Why it matters to the stock. Metallization is changing from tungsten to molybdenum as contacts shrink, and Lam is one of the few suppliers with a production molybdenum ALD tool. Share gains in this step show up in systems revenue, which the etch project tracks.
News
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