ASML plans 30% more EUV and DUV capacity in 2027, with a further increase under review for 2028

ASML plans to lift low-NA EUV output by about 30% in 2027 from roughly 65 systems in 2026, and to add a similar increase in DUV immersion output from about 130 systems. A further 30% expansion for 2028 is under evaluation and is not a firm commitment. Management said EUV is close to fully booked for 2027, with a substantial number of 2028 orders. Trade press attributes the figures to ASML plans reported with the Q2 results, not to a separate capacity announcement.

• Low-NA EUV: about 65 systems planned for 2026, about 30% more in 2027
• DUV immersion: about 130 systems in 2026, about 30% more planned for 2027
• A further 30% increase for 2028 is under evaluation, with no system count given
• EUV described as close to fully booked for 2027