DUV immersion lithography systems
Largest revenue line by 2025 sales, but down 6% year on year.
The numbers
What it is
Deep-ultraviolet scanners, mostly immersion tools, used for the many chip layers that do not need EUV. Sales are sensitive to export rules on tools sold into China.
Why it matters to the stock. DUV keeps ASML's installed base and service revenue growing and shows how much of its sales depend on China demand and export licensing.
News
Reports say Chinese chipmakers stockpiled hundreds of ASML immersion DUV systems
A German financial news site reported, citing media reports, that Chinese chipmakers have stockpiled hundreds of ASML immersion DUV systems worth several billion dollars.
ASML shares slide after report that China has begun making immersion DUV tools
Reuters reported that a state-owned Chinese company has started mass production of domestically made immersion DUV lithography tools.
ASML plans 30% more EUV and DUV capacity in 2027, with a further increase under review for 2028
ASML plans to lift low-NA EUV output by about 30% in 2027 from roughly 65 systems in 2026, and to add a similar increase in DUV immersion output from about 130 systems.
US MATCH Act proposal would ban all immersion DUV exports to China and tighten servicing curbs
Trade press reported on a US bill, the MATCH Act, that would ban exports of all deep-ultraviolet immersion lithography machines to China and further restrict servicing there.